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The Support Center for Microsystems Education is a Regional Advanced Technology Education Center funded in part by the National Science Foundation. This learning module contains instructional material as well as...
This animation, created by Southwest Center for Microsystems Education (SCME), "illustrates the removal or etch of the sacrificial layer of silicon dioxide. Removing this layer allows the micro-cantilevers to move. Such...
The Support Center for Microsystems Education is a Regional Advanced Technology Education Center funded in part by the National Science Foundation. This unit introduces users to the environmental and bioterrorism...
The Support Center for Microsystems Education presents this learning module on micromachining. The module provides an overview of three widely used micromachining processes for fabricating microsystems or MEMS: bulk,...
This animation, created by Southwest Center for Microsystems Education (SCME), " illustrates the anisotropic etch on the backside of a silicon wafer. The chamber formed as a result of this etch is used as the reference...
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