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This web page offers a tutorial by Daniel M. Dobkin, Ph.D, proprietor of Enigmatics Consulting of Sunnyvale, California that introduces fundamental principles of chemical vapor deposition of films. Topics covered...
This website includes a brief overview of the technology and some of the methods used to create microstructures, or MEMS (MicroElectricalMechanical Systems), including an overview of the 3 basic building blocks: ...
This paper describes the experience of Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM) in establishing the Micro Fabrication Cleanroom (MFC). This facility is mainly designed for teaching undergraduate...
The Support Center for Microsystems Education is a Regional Advanced Technology Education Center funded in part by the National Science Foundation. This learning module contains instructional material as well as...
The Support Center for Microsystems Education is a Regional Advanced Technology Education Center funded in part by the National Science Foundation. This learning module contains instructional material as well as...
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