This article is a comprehensive review of 193nm immersion lithography. It focuses on the materials and processes rather than the optical system of the tool. The article covers the history and current status of the...

This course, created by the Massachusetts Institute of Technology, introduces the fundamentals of machine tool and computer tool use. Students work with a variety of machine tools including the bandsaw, milling machine,...

This course, taught by Prof. George Barbastathis of the Massachusetts Institute of Technology, concerns the theory and practice of optical methods in engineering and system design, with an emphasis on diffraction,...

The 2004 Science and Engineering (S&E) Indicators report, produced biennially by the National Science Board (also reported on in the May 10, 2002 report), is considered "the nation's most authoritative source for...

This paper from the United States Department of Energy looks at the state of fuel cells and their use in the United States for the year 2010. The document is quite extensive and includes financial data, information on...