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Title: Lurie Nanofabrication Facility
Url: https://www.nnin.org/research-support/nnin-sites/university-michigan
Publisher: National Nanotechnology Infrastructure Network
University of Michigan
Description: The Michigan Nanofabrication Facility (MNF) at the University of Michigan Solid-State Electronics Laboratory (SSEL) is one of the leading centers worldwide on micro electromechanical systems (MEMS) and microsystems. It provides facilities and processes for the integration of Si integrated circuits and MEMS with nanotechnology, with applications in biology, medical systems, chemistry, and environmental monitoring. The MNF builds on its experience in integration of Si-based electronics with MEMS transducers and micropackaging to push these interfaces into the nanometer regime with emphasis on the fabrication, packaging, and testing of integrated devices for chemical and biological sensing, electrical stimulation of biological systems, and integrated fluidic systems.
LC Classification: Bibliography. Library science. Information resources (General) -- Subject bibliography -- Electricity -- Special topics, A-Z -- Electromechanical devices
Bibliography. Library science. Information resources (General) -- Subject bibliography -- Electronics
Technology -- Electrical engineering. Electronics. Nuclear engineering
Technology -- Technology (General) -- Nanotechnology
GEM Subject: Science
Science -- Engineering
Science -- Technology
Key Concept: Physics -- Electricity
Date Issued: 2004
Resource Type: Reference Material
Format: Document -- HTML
Audience: Educator
Learner
Professional/Practitioner
Education Level: Higher Education
Higher Education -- Graduate/Professional
Higher Education -- Undergraduate (Lower Division)
Higher Education -- Undergraduate (Upper Division)
Higher Education -- Technical Education (Upper Division)
Higher Education -- Technical Education (Lower Division)
Vocational/Professional Development Education
Language: English
Rights: National Nanotechnology Infrastructure Network
Access Rights: Free access
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Source Type: ATE Center
Source: NetWorks
Full Record Views: 14
Resource URL Clicks: 23
Cumulative Rating: NOT YET RATED
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