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Title: Micro/Nano Processing Technology
Url: https://ocw.mit.edu/courses/6-152j-micro-nano-processing-technology-fa...
Creator: Ruff, Susan
Schmidt, Martin
Publisher: Massachusetts Institute of Technology
Description: This course introduces the theory and technology of micro/nano fabrication. Lectures and laboratory sessions focus on basic processing techniques such as diffusion, oxidation, photolithography, chemical vapor deposition, and more. Through team lab assignments, students are expected to gain an understanding of these processing techniques, and how they are applied in concert to device fabrication. Students enrolled in this course have a unique opportunity to fashion and test micro/nano-devices, using modern techniques and technology.This course features detailed lecture slides in the lecture notes section, along with other lab materials used by students in the course in the labs section. In addition, problem sets with solutions are also provided in the assignments section.
LC Classification: Science -- Chemistry -- Laboratories -- Techniques and operations -- Special, A-Z -- Oxidation
Science -- Physics -- Atomic physics. Constitution and properties of matter -- Solids. Solid state physics -- Special topics, A-Z -- Diffusion
Technology -- Manufactures -- Metal manufactures. Metalworking -- Metal finishing and surface treatment (General) -- Vapor-plating. Chemical vapor deposition
Technology -- Photography -- Photomechanical processes -- Photolithography
Technology -- Technology (General) -- Nanotechnology
GEM Subject: Science
Science -- Engineering
Science -- Technology
Science -- Physics
Key Concept: Chemistry -- Oxidation
Biology -- Diffusion
Date Issued: 2008
Resource Type: Reference Material
Instructional Material -- Course
Format: ZIP
Document -- PDF
Document -- HTML
Audience: Educator
Learner
Professional/Practitioner
Education Level: Higher Education
Higher Education -- Undergraduate (Lower Division)
Higher Education -- Undergraduate (Upper Division)
Higher Education -- Technical Education (Upper Division)
Higher Education -- Technical Education (Lower Division)
Vocational/Professional Development Education
Language: English
Rights: MIT
Access Rights: Free access
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Source Type: ATE Center
Source: NetWorks
Full Record Views: 23
Resource URL Clicks: 21
Cumulative Rating: NOT YET RATED
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