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Title: Reactive Ion Etch Lab
Url: http://nano4me.live.subhub.com/downloads/20130404_2
Publisher: National Center for Nanotechnology Applications and Career Knowledge
Description:

This document, created by Pennsylvania State University and hosted by the Nanotechnology Applications and Career Knowledge Network, serves as a guide for a laboratory activity where students work with the "dry etch process and determine the resultant etch rates of multiple materials by analyzing data obtained throughout the experiment." The lab guide includes objectives, an introduction to dry etching, step-by-step directions to the lab activity itself, including links to video demonstrations, and post-lab questions to test student comprehension. In order to access and download this material, users must complete a free registration.

LC Classification: Technology -- Chemical technology -- Chemical engineering -- Special processes and operations, A-Z -- Etching
Technology -- Technology (General) -- Nanotechnology
GEM Subject: Science -- Technology
Key Concept: Manufacturing -- Nanofabrication
Resource Type: Instructional Material
Instructional Material -- Problem Set
Instructional Material -- Experiment/Lab Activity
Format: Document -- PDF
Document -- HTML
Audience: Educator
Education Level: Higher Education -- Undergraduate (Lower Division)
Language: English
Rights: The Pennsylvania State University
Access Rights: Free access with registration
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