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Title: Wet Oxidation Process
Url: https://www.youtube.com/watch?v=o7gZP55J_bE&list=UUY5kdNUUoAp548-sWdwT...
Publisher: Southwest Center for Microsystems Education

In this YouTube video, created by Southwest Center for Microsystems Education (SCME), viewers can watch an animation on the wet oxidation process. This animation "illustrates the chemistry of a wet thermal oxidation process that is used to grow silicon dioxide (SiO2) on a silicon (Si) wafer. In a wet oxidation process, water vapor (H2O) interacts with the silicon atoms at the SiO2-Si interface to form SiO2. This process is discussed in more detail in the Deposition Overview for MEMS Learning Module" found on the SCME website.

LC Classification: Technology -- Chemical technology -- Chemical engineering -- Special processes and operations, A-Z -- Oxidation
GEM Subject: Science -- Biology
Health -- Technology
Philosophy -- Ethics
Key Concept: Manufacturing -- Nanofabrication
Date Issued: 2014-01-21
Resource Type: Instructional Materials
MovingImage (DCMI Type Vocabulary)
Format: flash
Audience: College/University Instructors
General Public
Higher Education
Professional Formation
Secondary Education
Technical School First Cycle
Technical School Second Cycle
University First Cycle
University Postgrad
Vocational Training
Language: English
Rights: Southwest Center for Microsystems Education
Access Rights: Free access
Source Type: ATE Center
Source: Southwest Center for Microsystems Education
Full Record Views: 3
Resource URL Clicks: 1
Cumulative Rating: NOT YET RATED
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