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Title: Wet vs. Dry Oxidation Processes
Url: https://www.youtube.com/watch?v=nzF8f6ocqXo&list=UUY5kdNUUoAp548-sWdwT...
Publisher: Southwest Center for Microsystems Education
Description:

In this YouTube video, created by Southwest Center for Microsystems Education (SCME), viewers can watch an animation on the the difference between wet and dry thermal oxidation processes. This animation "shows a side by side comparison of a wet oxidation process vs. a dry oxidation process. Both processes use an oxygen source to grow silicon dioxide (SiO2) on a silicon wafer heated furnace. Wet thermal oxidation uses water vapor. Dry thermal oxidation uses oxygen gas." Viewers can learn more on this topic in the Deposition Overview for MEMS Learning Module which can be found on the SCME website along with supplementary materials. 

LC Classification: Technology -- Chemical technology -- Chemical engineering -- Special processes and operations, A-Z -- Oxidation
GEM Subject: Science -- Chemistry
Science -- Biology
Health -- Technology
Key Concept: Chemistry -- Oxidation
Manufacturing -- Nanofabrication
Date Issued: 2013-10-24
Resource Type: Instructional Material
Audio/Visual -- Movie/Animation
Format: Video -- HTML5
Document -- HTML
Audience: Educator
Learner
Professional/Practitioner
Education Level: High School
Higher Education
Higher Education -- Graduate/Professional
Higher Education -- Undergraduate (Lower Division)
Higher Education -- Technical Education (Upper Division)
Higher Education -- Technical Education (Lower Division)
Vocational/Professional Development Education
Language: English
Rights: Southwest Center for Microsystems Education
Access Rights: Free access
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Source Type: ATE Center
Source: Southwest Center for Microsystems Education
Full Record Views: 1
Resource URL Clicks: 1
Cumulative Rating: NOT YET RATED
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