Etch Overview for Microsystems Learning Module

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Title:

Etch Overview for Microsystems Learning Module

Url:

http://scme-support.org/index.php/educational-materials/category-02/et...

Publisher:

Support Center for Microsystems Education

Description: This page from the Support Center for Microsystems Education features a learning module which presents a general overview of various etch processes used in the construction of microsystems. A participant guide, instructor guide (both in PDF format) and a comprehensive powerpoint presentation are included. Furthermore, an additional presentation describes the rainbow wafer activity which teaches students to interpret graphs and charts related to silicon dioxide thickness on a silicon wafer

LC Classification:

Technology -- Chemical technology -- Chemical engineering -- Special processes and operations, A-Z -- Etching
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Microelectromechanical systems
Technology -- Technology (General) -- Technical education. Technical schools

GEM Subject:

Science -- Engineering
Science -- Technology
Science -- Instructional issues
Vocational Education -- Technology
Vocational Education -- Technical
Vocational Education -- Instructional issues

Key Concept:

Manufacturing -- Microfabrication
Manufacturing -- Nanofabrication

Resource Type:

Reference Material
Audio/Visual -- Graph
Instructional Material
Instructional Material -- Problem Set
Instructional Material -- Lesson/Lesson Plan
Instructional Material -- Instructor Guide/Manual

Format:

Document -- PDF
Document -- PPT
Document -- HTML

Audience:

Educator
Learner

Education Level:

High School
Higher Education
Higher Education -- Undergraduate (Lower Division)
Higher Education -- Undergraduate (Upper Division)
Higher Education -- Technical Education (Upper Division)
Higher Education -- Technical Education (Lower Division)
Vocational/Professional Development Education

Language:

English

Rights:

SCME

Access Rights:

Free access

Screenshot

Full Image

Source Type:

ATE Center

Source:

Southwest Center for Microsystems Education

Full Record Views:

Resource URL Clicks:

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