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Title: Top-Down Nanomanufacturing: Deposition
Url: http://www.eng.buffalo.edu/Research/NAMCATE/students/index.php?option...
Publisher: State University of New York at Buffalo. School of Engineering and Applied Sciences
Description: This overview of nanotechnology is presented by the NaMCATE project. According to the introductory page, "in related silicon processes for fabrication of MEMS (microelectromechanical devices), deposition of so-called sacrificial layers of oxides or other material are made, and then these layers are removed to free the moving mechanical components from being bonded to the surface." In this module, the various deposition processes are described. Additionally, the module provides three learning activities titled Sputtering Copper, Evaporative Deposition, and Electrochemical Deposition and Chemical Etching. Lastly, a performance assessment and powerpoint presentation are included.

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LC Classification: Technology -- Technology (General) -- Nanotechnology
Technology -- Manufactures -- Metal manufactures. Metalworking -- Metal finishing and surface treatment (General) -- Vapor-plating. Chemical vapor deposition
Technology -- Engineering (General). Civil engineering -- Engineering (General). Civil engineering (General) -- Materials of engineering and construction -- Materials of special composition or structure, A-Z -- Nanostructured materials
GEM Subject: Science -- Technology
Science -- Physics
Science -- Instructional issues
Key Concept: Manufacturing -- Nanofabrication
Manufacturing -- Deposition
Key Concepts Complete: Yes
Resource Type: Charts and Diagrams
Instructional Materials
Lesson Plans
Mathematics Materials
Overviews
Reading Materials
Science Materials
Teaching Guides
Format: doc
flash
html
ppt
Audience: College/University Instructors
Higher Education
Secondary Education
Students
Teachers
Technical School First Cycle
Technical School Second Cycle
University First Cycle
University Second Cycle
Vocational Training
Language: English
Access Rights: Free access
Date Of Record Release: 2011-09-22 15:32:11 (W3C-DTF)
Date Last Modified: 2011-10-07 14:19:52 (W3C-DTF)
Source Type: ATE Project
Source: ATE Projects
Full Record Views: 92
Resource URL Clicks: 112
Cumulative Rating: NOT YET RATED
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