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Title: Top-Down Nanomanufacturing: Etching Process
Url: http://www.eng.buffalo.edu/Research/NAMCATE/students/index.php?option...
Publisher: State University of New York at Buffalo. School of Engineering and Applied Sciences
Description: This overview of nanotechnology is presented by the NaMCATE project. According to the introductory page,
"in the top-down nano-manufacturing process flow, etch processes permanently transfer a mask pattern to a substrate or clean the surface of remaining materials for subsequent processing steps." In this module, methods of etching and steps in etch process are presented. Additionally, the module provides three learning activities titled Chemical Etching, Physical (Sputter) Etch, and Electrochemical Deposition and Chemical Etching. Lastly, a performance assessment and two powerpoint presentations are included.

Users must create a free login in order to access materials. 10/7/11 -AHT
LC Classification: Technology -- Chemical technology -- Chemical engineering -- Special processes and operations, A-Z -- Etching
Technology -- Engineering (General). Civil engineering -- Engineering (General). Civil engineering (General) -- Materials of engineering and construction -- Materials of special composition or structure, A-Z -- Nanostructured materials
Technology -- Technology (General) -- Nanotechnology
GEM Subject: Science -- Technology
Science -- Physics
Science -- Instructional issues
Key Concept: Manufacturing -- Nanofabrication
Resource Type: Charts and Diagrams
Instructional Materials
Lesson Plans
Mathematics Materials
Reading Materials
Science Materials
Teaching Guides
Format: doc
Audience: College/University Instructors
Higher Education
Secondary Education
Technical School First Cycle
Technical School Second Cycle
University First Cycle
University Second Cycle
Vocational Training
Language: English
Access Rights: Free access
Date Of Record Release: 2015-03-23 13:04:12 (W3C-DTF)
Date Last Modified: 2015-02-16 08:42:43 (W3C-DTF)
Source Type: ATE Project
Source: ATE Projects
Full Record Views: 71
Resource URL Clicks: 38
Cumulative Rating: NOT YET RATED
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