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Title
:
The Road to Extreme-Ultraviolet Lithography
Url
:
https://spie.org/news/0431-the-road-to-extreme-ultraviolet-lithography...
Creator
:
La Fontaine, Bruno
Publisher
:
Society of Photo-optical Instrumentation Engineers
Description
:
Extreme ultraviolet lithography promises to be the key enabler for patterning semiconductor devices of the future, but a number of challenges remain.
LC Classification
:
Fine arts -- Print media -- Lithography -- Addresses, essays, lectures
Science -- Physics -- Optics. Light -- Spectroscopy -- Ultraviolet spectrum
Technology -- Mechanical engineering and machinery -- Control engineering systems. Automatic machinery -- Control systems -- Special, A-Z -- Semiconductors
GEM Subject
:
Science -- Engineering
Science -- Technology
Key Concept
:
Physics -- Lasers
Physics -- Semiconductors
Resource Type
:
Reference Material
Instructional Material
Format
:
Document -- HTML
Audience
:
Educator
Learner
Professional/Practitioner
Education Level
:
High School
Higher Education
Higher Education -- Undergraduate (Lower Division)
Higher Education -- Undergraduate (Upper Division)
Higher Education -- Technical Education (Upper Division)
Higher Education -- Technical Education (Lower Division)
Vocational/Professional Development Education
Language
:
English
Rights
:
SPIE
Access Rights
:
Free access
Screenshot
Full Image
Source Type
:
ATE Center
Source
:
NetWorks
Full Record Views
:
26
Resource URL Clicks
:
19
Cumulative Rating:
NOT YET RATED
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