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Title: Questor - Photolithography SWF
Url: http://www.matec.org/questor/matec/M041FL01.swf
Publisher: Maricopa Advanced Technology Education Center (MATEC)
Description: Play the Questor Game to answer questions on photolithography. The objective is to explain the three (3) primary stages of the photolithography process. -Describe the steps the photolithography equipment uses to process a pattern on a silicon wafer. -Describe the coater equipment modules and their purposes. -Describe the purpose of the exposure equipment. -Describe the four printing methods. -Describe the purpose of the primary subsystems of an exposure tool. -Describe the process steps and recipe settings for a coater, an exposure tool, and a developer.
LC Classification: Technology -- Electrical engineering. Electronics. Nuclear engineering
Technology -- Photography -- Photomechanical processes -- Photolithography
GEM Subject: Science -- Engineering
Vocational Education -- Trade and industrial
Resource Type: InteractiveResource (DCMI Type Vocabulary)
Lesson Plans
Reading Materials
Science Materials
Test Reviews
Format: flash
Audience: College/University Instructors
Higher Education
Professional Formation
Secondary Education
Students
Teachers
Technical School First Cycle
University First Cycle
University Postgrad
University Second Cycle
Vocational Training
Language: English
Rights: Maricopa Advanced Technology Education Center
Access Rights: Free access
Date Of Record Release: 2010-05-07 03:00:02 (W3C-DTF)
Date Last Modified: 2011-08-25 15:53:11 (W3C-DTF)
Source Type: ATE Center
Source: NetWorks
Full Record Views: 43
Resource URL Clicks: 14
Cumulative Rating: NOT YET RATED
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