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Title: The Etch Process
Url: http://matec.org/animations/#M047FL01
Publisher: Maricopa Advanced Technology Education Center (MATEC)
Description: This website includes an animation which shows the plasma etching of silicon dioxide. In this type of plasma etching process, a chlorine gas and argon gas mixture is used. The chlorine gas neutral charge molecules bond with the surface silicon dioxide molecules and create silicon chloride molecule. Through the bombardment of the plasma charged Argon molecules the silicon chloride molecules are released from the surface layer. The etch continues till the exposed silicon dioxide material is removed. Objective: Describe in detail the etch process. This simulation is from Module 047 of the Process and Equipment II of the MATEC Module Library (MML). You can find this animation under the heading "Process & Equipment II." To view other clusters or for more information about the MML visit http://matec.org/ps/library3/process_I.shtml
LC Classification: Education -- Special aspects of education -- Types of education -- Vocational education (General)
Social sciences -- Industries. Land use. Labor -- Industries. Land use. Labor -- Special industries and trades -- Mechanical industries -- Electronic industries -- Particular equipment, A-Z -- Integrated circuits industry
Technology -- Electrical engineering. Electronics. Nuclear engineering
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Microelectronics. Integrated circuits
GEM Subject: Science -- Engineering
Science -- Technology
Science -- Physics
Science -- Instructional issues
Vocational Education -- Instructional issues
Key Concept: Computer science -- Transistors and integrated circuits
Electrical engineering
Manufacturing -- Integrated circuits
Resource Type: Instructional Materials
InteractiveResource (DCMI Type Vocabulary)
Laboratory Modules
Science Materials
Format: flash
Audience: College/University Instructors
Higher Education
Professional Formation
Teaching Professionals
Technical School First Cycle
Technical School Second Cycle
University First Cycle
University Postgrad
University Second Cycle
Vocational Training
Language: English
Rights: Maricopa Advanced Technology Education Center
Access Rights: Free access
Date Of Record Release: 2012-11-09 11:46:04 (W3C-DTF)
Date Last Modified: 2011-08-25 15:52:48 (W3C-DTF)
Source Type: ATE Center
Source: NetWorks
Full Record Views: 24
Resource URL Clicks: 8
Cumulative Rating: NOT YET RATED
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