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Title: The Beginner's Guide to MEMS Processing
Url: https://www.memsnet.org/mems/processes/
Publisher: MEMS and Nanotechnology Exchange
Description: This website includes a brief overview of the technology and some of the methods used to create microstructures, or MEMS (MicroElectricalMechanical Systems), including an overview of the 3 basic building blocks: deposition, lithography, and etch.
LC Classification: Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Microelectromechanical systems
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Microelectronics. Integrated circuits
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Study and teaching
Technology -- Technology (General) -- Nanotechnology
GEM Subject: Science -- Engineering
Science -- Technology
Science -- Instructional issues
Vocational Education -- Technology
Vocational Education -- Instructional issues
Key Concept: Electrical engineering
Manufacturing -- Microfabrication
Manufacturing -- Nanofabrication
Resource Type: Demonstrations
Instructional Materials
Science Materials
Format: html
Audience: College/University Instructors
General Public
Higher Education
Professional Formation
Teaching Professionals
Technical School First Cycle
Technical School Second Cycle
University First Cycle
University Postgrad
University Second Cycle
Vocational Training
Language: English
Rights: MEMSnet
Access Rights: Free access
Subject: Electrical Engineering -- Devices, Materials and Fabrication
Date Of Record Release: 2012-12-20 09:42:33 (W3C-DTF)
Date Last Modified: 2011-08-29 14:22:21 (W3C-DTF)
Source Type: ATE Center
Source: NetWorks
Full Record Views: 39
Resource URL Clicks: 4
Cumulative Rating: this resource has a 5 star rating (Based on 1 response.)
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