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Title: Vacuum Gauges PDF
Url: http://matec.org/modules/M101AB01.pdf
Publisher: Maricopa Advanced Technology Education Center (MATEC)
Description: This is a description for a learning module from Maricopa Advanced Technology Education Center. This PDF describes the module; access may be purchased by visiting the MATEC website. Semiconductor manufacturing equipment requires the use of many different types of vacuum gauges. Selection is based on range of process operations and production requirements. This MATEC module explores the theory and functionality of vacuum gauges and provides many examples of different types of gauges. The focus is on understanding the operating ranges and application constraints of each type of gauge. Mathematical equations are used to explain calibration, sensitivity, and overall operations of each type of gauge.
LC Classification: Education -- Special aspects of education -- Types of education -- Vocational education (General) -- Special topics, A-Z -- Curriculum
Technology -- Building construction -- Heating and ventilation -- Ventilation of buildings -- Dust removal (by pneumatic suction, etc.) -- Special systems. By name, A-Z -- Vacuum system
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Microelectronics. Integrated circuits -- Vacuum microelectronics
Technology -- Mechanical engineering and machinery -- Vacuum technology
Technology -- Technology (General) -- Technical education. Technical schools
GEM Subject: Science -- Engineering
Science -- Technology
Science -- Instructional issues
Vocational Education -- Technology
Vocational Education -- Instructional issues
Key Concept: Physics -- Semiconductors
Physics -- Pressure
Key Concepts Complete: Yes
Resource Type: Demonstrations
Instructional Materials
Lesson Plans
Science Materials
Service (DCMI Type Vocabulary)
Format: pdf
Audience: College/University Instructors
Higher Education
Professional Formation
Teaching Professionals
Technical School First Cycle
Technical School Second Cycle
University First Cycle
University Postgrad
University Second Cycle
Vocational Training
Language: English
Access Rights: Free access
Subject: Electrical Engineering -- Devices, Materials and Fabrication
Date Of Record Release: 2012-11-28 09:28:31 (W3C-DTF)
Date Last Modified: 2011-09-06 11:20:22 (W3C-DTF)
Source Type: ATE Center
Source: NetWorks
Full Record Views: 88
Resource URL Clicks: 11
Cumulative Rating: NOT YET RATED
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