Description:
This PowerPoint created and presented by the Nanotechnology Applications and Career Knowledge (NACK) Center discusses etch systems. The presentation provides descriptions and examples of nine different system classifications, including Horizontal Plate RIE, Parallel Plate Etch, Microwave Etch, Electron Cyclotron Resonance (ECR) Etch, Hexode RIE, MERIE, Inductively Coupled Plasma (ICP) Etch, Ion Beam Etch, and Advanced Strip and Passivation (ASP). This presentation also has a cluster tools section, explaining their function and configuration. This is a great resource for any classroom looking at nanofabrication modifications. This and all other valuable resources from the NACK Center require a fast, easy, free log-in.
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