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Title: Materials Modification in Nanotechnology: Material Fabrication Utilizing Dry Etch Chemistry
Url: http://nano4me.live.subhub.com/downloads/20091120_3
Publisher: National Center for Nanotechnology Applications and Career Knowledge
Pennsylvania State University
Description: This PowerPoint created and presented by the Nanotechnology Applications and Career Knowledge (NACK) Center presents a detailed overview of all things dry etch chemistry. Its goes over key vocabulary, and introduces students to the necessary background information to understand the plasma process. Sidewall Passivation, the “Egg” chart, microloading, etch evaluation, and identifying an endpoint are other topics that are explained in this presentation. This is a great resource for any classroom looking at nanofabrication modifications. This and all other valuable resources from the NACK Center require a fast, easy, free log-in.
LC Classification: Technology -- Chemical technology -- Chemical engineering -- Special processes and operations, A-Z -- Etching
Technology -- Engineering (General). Civil engineering -- Engineering (General). Civil engineering (General) -- Materials of engineering and construction -- Materials of special composition or structure, A-Z -- Nanostructured materials
Technology -- Engineering (General). Civil engineering -- Engineering (General). Civil engineering (General) -- Plasma engineering. Applied plasma dynamics
Technology -- Technology (General) -- Nanotechnology
GEM Subject: Science -- Engineering
Science -- Technology
Vocational Education -- Technology
Vocational Education -- Trade and industrial
Key Concept: Manufacturing -- Nanofabrication
Date Issued: 2009
Resource Type: Reference Material
Instructional Material
Format: Document -- PPT
Document -- HTML
Audience: Educator
Learner
Education Level: Higher Education
Higher Education -- Undergraduate (Lower Division)
Higher Education -- Technical Education (Upper Division)
Higher Education -- Technical Education (Lower Division)
Vocational/Professional Development Education
Language: English
Rights: Pennsylvania State University
Access Rights: Free access
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Source Type: ATE Center
Source: National Center for Nanotechnology Applications and Career Knowledge
Full Record Views: 17
Resource URL Clicks: 7
Cumulative Rating: NOT YET RATED
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