Description:
This PowerPoint created and presented by the Nanotechnology Applications and Career Knowledge (NACK) Center presents a detailed overview of all things dry etch chemistry. Its goes over key vocabulary, and introduces students to the necessary background information to understand the plasma process. Sidewall Passivation, the “Egg” chart, microloading, etch evaluation, and identifying an endpoint are other topics that are explained in this presentation. This is a great resource for any classroom looking at nanofabrication modifications. This and all other valuable resources from the NACK Center require a fast, easy, free log-in.
Resource Comments