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Title: Materials Modification in Nanotechnology: Material Fabrication Utilizing Plasma Enhanced Chemical Vapor Deposition (PECVD)
Url: http://nano4me.live.subhub.com/downloads/20091120_2
Publisher: National Center for Nanotechnology Applications and Career Knowledge
Pennsylvania State University
Description: This PowerPoint presentation created and presented by the Nanotechnology Applications and Career Knowledge (NACK) Center introduces students to the topic of Material Fabrication Utilizing Plasma Enhanced Chemical Vapor Deposition (PECVD). An overview of the concept of plasma deposition is provided, including explanations of important deposition aspects, such as step coverage and uniform coverage. The Chemical Vapor Deposition Model is explained, as well as film growth, and issues concerning PECVD deposition. Finally, different types of PECVD deposition are explained; for example, the details of depositions with silicon nitride, tungsten, and copper are presented here. This and all other valuable resources from the NACK Center require a fast, easy, free log-in.
LC Classification: Technology -- Engineering (General). Civil engineering -- Engineering (General). Civil engineering (General) -- Plasma engineering. Applied plasma dynamics
Technology -- Manufactures -- Metal manufactures. Metalworking -- Metal finishing and surface treatment (General) -- Vapor-plating -- Plasma-enhanced chemical vapor deposition
Technology -- Technology (General) -- Nanotechnology
GEM Subject: Science -- Engineering
Science -- Technology
Vocational Education -- Technology
Vocational Education -- Trade and industrial
Key Concept: Manufacturing -- Nanofabrication
Date Issued: 2009
Resource Type: Reference Material
Instructional Material
Format: Document -- PPT
Document -- HTML
Audience: Educator
Learner
Education Level: Higher Education
Higher Education -- Undergraduate (Lower Division)
Higher Education -- Technical Education (Upper Division)
Higher Education -- Technical Education (Lower Division)
Vocational/Professional Development Education
Language: English
Rights: Pennsylvania State University
Access Rights: Free access
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Source Type: ATE Center
Source: National Center for Nanotechnology Applications and Career Knowledge
Full Record Views: 7
Resource URL Clicks: 9
Cumulative Rating: NOT YET RATED
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