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View Resource Fundamentals of Chemical Vapor Deposition

This web page offers a tutorial by Daniel M. Dobkin, Ph.D, proprietor of Enigmatics Consulting of Sunnyvale, California that introduces fundamental principles of chemical vapor deposition of films. Topics covered include CVD Basics, Review of Ideal Gases, Review of Kinetic Theory, Zero-Dimensional Transport: Stirred Reactor, Transport in Gaseous Media, Chemistry for CVD, Plasmas for CVD, CVD...

View Resource Deposition Equipment

This is a description for a learning module from Maricopa Advanced Technology Education Center. This PDF describes the module; access may be purchased by visiting the MATEC website. Use this module to develop your learners' ability to control deposition equipment operations. The activities are adaptable to cleanroom or laboratory, and employ the Applied Materials Precision 5000 as a prototypical...

View Resource Materials Modification in Nanotechnology: Material Fabrication Utilizing Plasma Enhanced Chemical Vapor Deposition (PECVD)

This PowerPoint presentation created and presented by the Nanotechnology Applications and Career Knowledge (NACK) Center introduces students to the topic of Material Fabrication Utilizing Plasma Enhanced Chemical Vapor Deposition (PECVD). An overview of the concept of plasma deposition is provided, including explanations of important deposition aspects, such as step coverage and uniform...

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