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Title: Photolithography II: Pattern Transfer PDF
Url: http://www.cns.cornell.edu/documents/PhotolithographyII.pdf
Creator: Huang, Kevin
Plisch, Monica
Shull, Alison
Description: In this lab, students fabricate and test four Al resistors using the mask you made in the previous lab. Students learn about and use basic photolithographic techniques for patterning thin metallic films. The rest of the Introduction section gives background information on these techniques. The section "Patterning metallic films" discusses two overall strategies for patterning films and the following sections discuss individual steps in the process in more detail. For the first part of this laboratory activity, click here.
LC Classification: Science -- Physics -- Atomic physics. Constitution and properties of matter -- Solids. Solid state physics -- Thin films
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Apparatus and materials -- Other, A-Z -- Resistors
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Microelectronics. Integrated circuits
Technology -- Photography -- Photomechanical processes -- Photolithography
GEM Subject: Science
Science -- Engineering
Science -- Technology
Science -- Instructional issues
Date Issued: 2006
Resource Type: Instructional Materials
Lesson Plans
Reading Materials
Format: pdf
Audience: College/University Instructors
Higher Education
Students
Teachers
Technical School First Cycle
Technical School Second Cycle
University First Cycle
University Second Cycle
Vocational Training
Language: English
Access Rights: Free access
Subject: Manufacturing of Electronic Products
Date Of Record Release: 2008-10-16 11:22:00 (W3C-DTF)
Date Last Modified: 2011-09-13 20:07:09 (W3C-DTF)
Source Type: ATE Center
Source: National Center for Manufacturing Education
Full Record Views: 47
Resource URL Clicks: 10
Cumulative Rating: NOT YET RATED
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