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Title: Photolithography I: Thin Film Deposition and Mask Design PDF
Url: http://www.cns.cornell.edu/documents/PhotolithographyI.pdf
Creator: Buhrman, Robert A.
Huang, Kevin
Plisch, Monica
Shull, Alison
Description: In this lab, students design, fabricate and test four Al resistors using some of the techniques that are employed to make integrated circuits. First, students will evaporate a thin film of aluminum on a Si wafer. Then, they will use photolithographic techniques to pattern the film and etch away unwanted parts, leaving only your resistors. Students will complete the Al thin film deposition and mask design parts of the process. For the second part of this laboratory activity, click here.
LC Classification: Science -- Physics -- Atomic physics. Constitution and properties of matter -- Solids. Solid state physics -- Thin films
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Apparatus and materials -- Other, A-Z -- Resistors
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Microelectronics. Integrated circuits
Technology -- Photography -- Photomechanical processes -- Photolithography
GEM Subject: Science
Science -- Engineering
Science -- Technology
Science -- Instructional issues
Date Issued: 2006
Resource Type: Instructional Materials
Lesson Plans
Reading Materials
Format: pdf
Audience: College/University Instructors
Higher Education
Students
Teachers
Technical School First Cycle
Technical School Second Cycle
University First Cycle
University Second Cycle
Vocational Training
Language: English
Access Rights: Free access
Subject: computer-aided mask design
Manufacturing of Electronic Products
microfabrication
thin film processes
Date Of Record Release: 2008-10-16 11:22:00 (W3C-DTF)
Date Last Modified: 2011-09-13 20:06:13 (W3C-DTF)
Source Type: ATE Center
Source: National Center for Manufacturing Education
Full Record Views: 75
Resource URL Clicks: 15
Cumulative Rating: NOT YET RATED
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