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Title: Dry Thermal Oxidation Process
Url: https://www.youtube.com/watch?v=Kt_z2mX5DfY&list=UUY5kdNUUoAp548-sWdwT...
Publisher: Southwest Center for Microsystems Education
Description:

In this YouTube video, created by Southwest Center for Microsystems Education (SCME), viewers can watch an animation on the dry thermal oxidation process. This animation "illustrates the chemistry of a dry thermal oxidation process that is used to grow silicon dioxide (SiO2) on a silicon (Si) wafer. In a dry oxidation process, oxygen gas (O2) interacts with the silicon atoms at the SiO2 - Si interface to form SiO2. This process is discussed in more detail in the Deposition Overview for MEMS Learning Module" which can be found on the SCME website along with supplementary materials. 

LC Classification: Technology -- Chemical technology -- Chemical engineering -- Special processes and operations, A-Z -- Oxidation
GEM Subject: Science -- Biology
Health -- Technology
Philosophy -- Ethics
Key Concept: Manufacturing -- Nanofabrication
Date Issued: 2013-10-24
Resource Type: Instructional Material
Audio/Visual -- Movie/Animation
Format: Video -- HTML5
Document -- HTML
Audience: Educator
Learner
Professional/Practitioner
Education Level: High School
Higher Education
Higher Education -- Graduate/Professional
Higher Education -- Undergraduate (Lower Division)
Higher Education -- Technical Education (Upper Division)
Higher Education -- Technical Education (Lower Division)
Vocational/Professional Development Education
Language: English
Rights: Southwest Center for Microsystems Education
Access Rights: Free access
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Source Type: ATE Center
Source: Southwest Center for Microsystems Education
Full Record Views: 6
Resource URL Clicks: 7
Cumulative Rating: NOT YET RATED
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