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Title: Deposition Overview for Microsystems Learning Module
Url: http://scme-nm.org/index.php?option=com_docman&task=cat_view&gid=91&I...
Publisher: Southwest Center for Microsystems Education
Description: This page from the Southwest Center for Microsystems Education features a learning module which presents a general overview of deposition processes use in the fabrication of microsystems. Deposition is the fabrication process in which thin films of materials are deposited on a wafer. A participant guide, instructor guide (both in PDF format) and a comprehensive powerpoint presentation are included. Visitors are encouraged to create an account and login in order to access the full set of resources.
LC Classification: Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Microelectromechanical systems
Technology -- Manufactures -- Metal manufactures. Metalworking -- Metal finishing and surface treatment (General) -- Vapor-plating. Chemical vapor deposition
Technology -- Technology (General) -- Technical education. Technical schools
GEM Subject: Science -- Engineering
Science -- Technology
Science -- Instructional issues
Vocational Education -- Technology
Vocational Education -- Technical
Vocational Education -- Instructional issues
Key Concept: Manufacturing -- Deposition
Manufacturing -- Microfabrication
Manufacturing -- Nanofabrication
Resource Type: Charts and Diagrams
Instructional Materials
Lesson Plans
Reading Materials
Science Materials
Teaching Guides
Worksheets
Format: html
pdf
ppt
Audience: College/University Instructors
Higher Education
Secondary Education
Students
Teachers
Technical School First Cycle
Technical School Second Cycle
University First Cycle
University Second Cycle
Vocational Training
Language: English
Rights: SCME
Access Rights: Free access
Date Of Record Release: 2011-10-11 15:09:08 (W3C-DTF)
Date Last Modified: 2012-06-25 16:08:56 (W3C-DTF)
Source Type: ATE Center
Source: Southwest Center for Microsystems Education
Full Record Views: 37
Resource URL Clicks: 9
Cumulative Rating: NOT YET RATED
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