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Title: Semiconductor Manufacturing
Url: https://ocw.mit.edu/courses/6-780-semiconductor-manufacturing-spring-2...
Publisher: Massachusetts Institute of Technology
Description: 6.780 Semiconductor Manufacturing, a course through MIT's OpenCourseWare, covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics covered include: design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; and analysis and scheduling of semiconductor manufacturing operations. Course materials are downloadable via a zip file.
LC Classification: Science -- Physics -- Electricity and magnetism -- Electricity -- Electric current (General) -- Electric conductivity -- Semiconductor physics
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Apparatus and materials -- Semiconductors
GEM Subject: Science -- Engineering
Science -- Technology
Science -- Instructional issues
Key Concept: Physics -- Semiconductors
Date Issued: 2003
Resource Type: Instructional Material
Format: Document -- HTML
Audience: Administrator
Educator
Education Level: Higher Education
Higher Education -- Graduate/Professional
Higher Education -- Undergraduate (Lower Division)
Higher Education -- Undergraduate (Upper Division)
Higher Education -- Technical Education (Upper Division)
Higher Education -- Technical Education (Lower Division)
Vocational/Professional Development Education
Language: English
Rights: MIT
Access Rights: Free access
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Source Type: ATE Center
Source: NetWorks
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