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Title: Double Exposure Makes Dense High-Resolution Diffractive Optics
Url: http://spie.org/x8367.xml?highlight=x2410&ArticleID=x8367
Creator: Anderson, Erik
Chao, Weilun
Publisher: Society of Photographic Instrumentation Engineers
Description: This article from SPIE discusses an electron-beam-lithography technique which fabricates diffractive optical structures such as classic Fresnel-zone-plate lenses with fine features. Diffractive optical elements are especially useful in parts of the electromagnetic spectrum, such as the soft x-ray region, where suitable materials for reflective and refractive structures are not available.
LC Classification: Bibliography. Library science. Information resources (General) -- Book industries and trade -- Printing -- Practical printing -- Other processes, A-Z -- Lithography
Science -- Physics -- Optics. Light
Science -- Physics -- Optics. Light -- Optical instruments and apparatus (General)
GEM Subject: Science -- Engineering
Science -- Technology
Science -- Physics
Key Concept: Physics
Physics -- Waves
Physics -- Optics and light
Key Concepts Complete: Yes
Date Issued: 2007-03-21
Resource Type: Instructional Materials
Reading Materials
Science Materials
Format: html
Audience: College/University Instructors
Higher Education
Professional Formation
Teaching Professionals
Technical School First Cycle
Technical School Second Cycle
University First Cycle
University Postgrad
University Second Cycle
Vocational Training
Language: English
Rights: SPIE
Access Rights: Free access
Subject: Electrical Engineering
Engineering Education
Engineering Education -- Instructional Design
Industrial and Systems Engineering
Industrial and Systems Engineering -- Manufacturing Processes and Systems
Date Of Record Release: 2010-12-22 03:00:02 (W3C-DTF)
Date Last Modified: 2011-08-26 11:12:25 (W3C-DTF)
Source Type: ATE Center
Source: NetWorks
Full Record Views: 87
Resource URL Clicks: 19
Cumulative Rating: NOT YET RATED
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