You are not logged in.
AMSER logo

Title: The Road to Extreme-Ultraviolet Lithography
Url: http://spie.org/newsroom/0431-the-road-to-extreme-ultraviolet-lithogra...
Creator: La Fontaine, Bruno
Publisher: Society of Photo-optical Instrumentation Engineers
Description: Extreme ultraviolet lithography promises to be the key enabler for patterning semiconductor devices of the future, but a number of challenges remain.
LC Classification: Fine arts -- Print media -- Lithography -- Addresses, essays, lectures
Science -- Physics -- Optics. Light -- Spectroscopy -- Ultraviolet spectrum
Technology -- Mechanical engineering and machinery -- Control engineering systems. Automatic machinery -- Control systems -- Special, A-Z -- Semiconductors
GEM Subject: Science -- Engineering
Science -- Technology
Key Concept: Physics -- Lasers
Physics -- Semiconductors
Resource Type: Instructional Materials
Reading Materials
Science Materials
Format: html
Audience: College/University Instructors
Professional Formation
Secondary Education
Technical School First Cycle
Technical School Second Cycle
University First Cycle
University Second Cycle
Vocational Training
Language: English
Rights: SPIE
Access Rights: Free access
Source Type: ATE Center
Source: NetWorks
Full Record Views: 23
Resource URL Clicks: 2
Cumulative Rating: NOT YET RATED
Report a Problem with this Resource Record

Resource Comments

(no comments available yet for this resource)

user login
why log in?
Manage your resources
Save, organize, and share resources that you find.

Subscribe to bulletins
Automatically be notified about new resources that match your interests.

It's easy, fast, and FREE!
Have a favorite applied math or science site you want others to know about?

to add to AMSER

Copyright 2017 Internet Scout Resource Metadata
Copyright 2017 Internet Scout
NSF NSDL University of Wisconsin Internet Scout
Leave Feedback