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Title: How a Plasma Etcher Works
Url: http://matec.org/animations/#M048FL01
Publisher: Maricopa Advanced Technology Education Center (MATEC)
Description: This website includes an animation which illustrates how a Plasma Etcher works. Objective: Describe all the steps used to load, etch, and unload a wafer from a plasma etcher. This simulation is from Module 048 of the Process & Equipment II Cluster of the MATEC Module Library (MML). You can find this animation under the section "Process & Equipment II." To view other clusters or for more information about the MML visit http://matec.org/ps/library3/process_I.shtmlKey
LC Classification: Education -- Special aspects of education -- Types of education -- Vocational education (General)
Social sciences -- Industries. Land use. Labor -- Industries. Land use. Labor -- Special industries and trades -- Mechanical industries -- Electronic industries -- Particular equipment, A-Z -- Integrated circuits industry
Technology -- Electrical engineering. Electronics. Nuclear engineering
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Microelectronics. Integrated circuits
GEM Subject: Science -- Engineering
Science -- Technology
Science -- Physics
Science -- Instructional issues
Vocational Education -- Instructional issues
Key Concept: Computer science -- Transistors and integrated circuits
Electrical engineering
Manufacturing -- Integrated circuits
Key Concepts Complete: Yes
Resource Type: Instructional Materials
InteractiveResource (DCMI Type Vocabulary)
Laboratory Modules
Science Materials
Format: flash
html
Audience: College/University Instructors
Higher Education
Professional Formation
Teaching Professionals
Technical School First Cycle
Technical School Second Cycle
University First Cycle
University Postgrad
University Second Cycle
Vocational Training
Language: English
Rights: Maricopa Advanced Technology Education Center
Access Rights: Free access
Date Of Record Release: 2012-11-19 09:21:10 (W3C-DTF)
Date Last Modified: 2011-08-25 15:38:56 (W3C-DTF)
Source Type: ATE Center
Source: NetWorks
Full Record Views: 64
Resource URL Clicks: 2
Cumulative Rating: NOT YET RATED
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