Applied Math and Science Education Repository - The Beginner's Guide to MEMS Processing

You are not logged in.

advanced search

printer-friendly version

Title:

The Beginner's Guide to MEMS Processing

Url:

https://www.memsnet.org/mems/processes/

Publisher:

MEMS and Nanotechnology Exchange

Description: This website includes a brief overview of the technology and some of the methods used to create microstructures, or MEMS (MicroElectricalMechanical Systems), including an overview of the 3 basic building blocks: deposition, lithography, and etch.

LC Classification:

Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Microelectromechanical systems
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Microelectronics. Integrated circuits
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Study and teaching
Technology -- Technology (General) -- Nanotechnology

GEM Subject:

Science -- Engineering
Science -- Technology
Science -- Instructional issues
Vocational Education -- Technology
Vocational Education -- Instructional issues

Key Concept:

Electrical engineering
Manufacturing -- Microfabrication
Manufacturing -- Nanofabrication

Resource Type:

Instructional Material
Instructional Material -- Demonstration

Format:

Document -- HTML

Audience:

Educator
Professional/Practitioner

Education Level:

Higher Education
Higher Education -- Graduate/Professional
Higher Education -- Undergraduate (Lower Division)
Higher Education -- Undergraduate (Upper Division)
Higher Education -- Technical Education (Upper Division)
Higher Education -- Technical Education (Lower Division)
Vocational/Professional Development Education

Language:

English

Rights:

MEMSnet

Access Rights:

Free access

Screenshot

Full Image

Source Type:

ATE Center

Source:

NetWorks

Full Record Views:

Resource URL Clicks:

Cumulative Rating:

(Based on 1 response.)

Report a Problem with this Resource Record

Resource Comments

(no comments available yet for this resource)

forget your password?

Manage your resources
Save, organize, and share resources that you find.

Subscribe to bulletins
Automatically be notified about new resources that match your interests.

It's easy, fast, and FREE!

get your own login

AMSER =
FREE ONLINE
RESOURCES
for the
CLASSROOM

Leave Feedback

http://amser.org/