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Title: Deposition Equipment PDF
Url: http://matec.org/modules/M055AB01.pdf
Publisher: Maricopa Advanced Technology Education Center (MATEC)
Description: This is a description for a learning module from Maricopa Advanced Technology Education Center. This PDF describes the module; access may be purchased by visiting the MATEC website. Use this module to develop your learners' ability to control deposition equipment operations. The activities are adaptable to cleanroom or laboratory, and employ the Applied Materials Precision 5000 as a prototypical CVD tool. The module takes learners through a review of the deposition process, an introduction to the systems and subsystems of a CVD tool, and through an entire operations cycle from recipe interpretation through process control of inputs/outputs.
LC Classification: Education -- Special aspects of education -- Types of education -- Vocational education (General) -- Special topics, A-Z -- Curriculum
Technology -- Chemical technology -- Biotechnology -- Processes, operations, and techniques
Technology -- Manufactures -- Metal manufactures. Metalworking -- Metal finishing and surface treatment (General) -- Vapor-plating -- Plasma-enhanced chemical vapor deposition
Technology -- Manufactures -- Metal manufactures. Metalworking -- Metal finishing and surface treatment (General) -- Vapor-plating. Chemical vapor deposition
Technology -- Technology (General) -- Technical education. Technical schools
GEM Subject: Science -- Engineering
Science -- Technology
Science -- Instructional issues
Vocational Education -- Technology
Vocational Education -- Instructional issues
Key Concept: Physics -- Semiconductors
Manufacturing -- Integrated circuits
Key Concepts Complete: Yes
Resource Type: Demonstrations
Instructional Materials
Lesson Plans
Science Materials
Service (DCMI Type Vocabulary)
Format: pdf
Audience: College/University Instructors
Higher Education
Professional Formation
Teaching Professionals
Technical School First Cycle
Technical School Second Cycle
University First Cycle
University Postgrad
University Second Cycle
Vocational Training
Language: English
Access Rights: Free access
Subject: Electrical Engineering -- Devices, Materials and Fabrication
Date Of Record Release: 2012-12-21 09:44:11 (W3C-DTF)
Date Last Modified: 2011-08-29 13:10:10 (W3C-DTF)
Source Type: ATE Center
Source: NetWorks
Full Record Views: 95
Resource URL Clicks: 11
Cumulative Rating: NOT YET RATED
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