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Title: Wafer Inspection in the Photolithography Process PDF
Url: http://matec.org/modules/M045AB01.pdf
Publisher: Maricopa Advanced Technology Education Center (MATEC)
Description: This is a description for a learning module from Maricopa Advanced Technology Education Center. This PDF describes the module; access may be purchased by visiting the MATEC website. In this module, your learners begin to master the sensitive after develop inspection (ADI) methods that follow photolithography. MATEC describes macro- and micro-inspection techniques and distinguishes qualitative (inspection) from quantitative (metrology) methods. The chief focus is on teaching learners to examine wafers under an optical microscope; a simulated microscope is also provided in a computer-based training (CBT) format. The module covers edge bead inspection and provides extensive practice in flash boundary inspection, including evaluating Nikon crosses, overlay boxes, scanning electronic microscope features, resolution bars, Verniers, and product identification numbers.
LC Classification: Education -- Special aspects of education -- Types of education -- Vocational education (General) -- Special topics, A-Z -- Curriculum
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Apparatus and materials -- Semiconductors
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Microelectronics. Integrated circuits
Technology -- Photography -- Photomechanical processes -- Photolithography
Technology -- Technology (General) -- Technical education. Technical schools
GEM Subject: Science -- Engineering
Science -- Technology
Science -- Instructional issues
Vocational Education -- Technology
Vocational Education -- Instructional issues
Key Concept: Physics -- Semiconductors
Manufacturing -- Integrated circuits
Manufacturing -- Microfabrication
Key Concepts Complete: Yes
Resource Type: Demonstrations
Instructional Materials
Lesson Plans
Science Materials
Service (DCMI Type Vocabulary)
Format: pdf
Audience: College/University Instructors
Higher Education
Professional Formation
Teaching Professionals
Technical School First Cycle
Technical School Second Cycle
University First Cycle
University Postgrad
University Second Cycle
Vocational Training
Language: English
Access Rights: Free access
Subject: Electrical Engineering -- Devices, Materials and Fabrication
Date Of Record Release: 2012-12-03 09:32:40 (W3C-DTF)
Date Last Modified: 2011-09-06 11:15:41 (W3C-DTF)
Source Type: ATE Center
Source: NetWorks
Full Record Views: 67
Resource URL Clicks: 6
Cumulative Rating: NOT YET RATED
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