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Title: Materials Modification in Nanotechnology: Material Fabrication Utilizing Dry Etch Chemistry
Url: http://nano4me.live.subhub.com/downloads/20091120_3
Publisher: National Center for Nanotechnology Applications and Career Knowledge
Pennsylvania State University
Description: This PowerPoint created and presented by the Nanotechnology Applications and Career Knowledge (NACK) Center presents a detailed overview of all things dry etch chemistry. Its goes over key vocabulary, and introduces students to the necessary background information to understand the plasma process. Sidewall Passivation, the “Egg” chart, microloading, etch evaluation, and identifying an endpoint are other topics that are explained in this presentation. This is a great resource for any classroom looking at nanofabrication modifications. This and all other valuable resources from the NACK Center require a fast, easy, free log-in.
LC Classification: Technology -- Chemical technology -- Chemical engineering -- Special processes and operations, A-Z -- Etching
Technology -- Engineering (General). Civil engineering -- Engineering (General). Civil engineering (General) -- Materials of engineering and construction -- Materials of special composition or structure, A-Z -- Nanostructured materials
Technology -- Engineering (General). Civil engineering -- Engineering (General). Civil engineering (General) -- Plasma engineering. Applied plasma dynamics
Technology -- Technology (General) -- Nanotechnology
GEM Subject: Science -- Engineering
Science -- Technology
Vocational Education -- Technology
Vocational Education -- Trade and industrial
Key Concept: Manufacturing -- Nanofabrication
Date Issued: 2009
Resource Type: Instructional Materials
Reading Materials
Science Materials
Format: html
Audience: College/University Instructors
Higher Education
Technical School First Cycle
Technical School Second Cycle
University First Cycle
Vocational Training
Language: English
Rights: Pennsylvania State University
Access Rights: Free access
Source Type: ATE Center
Source: National Center for Nanotechnology Applications and Career Knowledge
Full Record Views: 13
Cumulative Rating: NOT YET RATED
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