Micro and Nano Fabrication Clean Room

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Title:

Micro and Nano Fabrication Clean Room

Url:

https://cmdis.rpi.edu/

Publisher:

Rensselaer Polytechnic Institute

Description: Rensselaer's Nanopatterning and fabrication clean room is a state-of-the-art, 10,000-square-foot, Class 100 multi-user facility with tools and infrastructure. It is located in the Low Center for Industrial Innovation. The MNCR currently performs end-to-end device fabrication, characterization, metrology and testing services to users from universities, local start-ups, and industrial institutions for research, education, and economic development. The facility has recently been upgraded to 8 wafer size with over $4M tools and infrastructure. While the facility is an 8 operation, it routinely processes 2-8 wafers for high speed electronics, power devices, ICs, and microsystems. In addition, the facility has a dedicated staff of five personnel to provide process solutions, training, teaching, and administration.Some of the unique capabilities of the center include the ability to define 3D interconnects for hyperintegration (alignment, bonding, wafer thinning, through wafer via definition by deep- oxide and Silicon etching and metallization). Hyperintegration involves vertical wafer-wafer 3D interconnect architectures, associated materials, and process technologies.

LC Classification:

Technology -- Building construction -- Heating and ventilation -- Ventilation of buildings -- Dust removal (by pneumatic suction, etc.) -- Clean rooms
Technology -- Manufactures -- Production management. Operations management -- Product engineering
Technology -- Photography -- Photomechanical processes -- Photolithography
Technology -- Technology (General) -- Nanotechnology

GEM Subject:

Science
Science -- Engineering
Science -- Technology

Resource Type:

Reference Material
Instructional Material

Format:

Document -- HTML

Audience:

Educator
Learner
Professional/Practitioner

Education Level:

Higher Education
Higher Education -- Graduate/Professional
Higher Education -- Undergraduate (Lower Division)
Higher Education -- Undergraduate (Upper Division)
Higher Education -- Technical Education (Upper Division)
Higher Education -- Technical Education (Lower Division)
Vocational/Professional Development Education

Language:

English

Access Rights:

Free access

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Source Type:

ATE Center

Source:

NetWorks

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