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This page from the Southwest Center for Microsystems Education features a learning module which presents a general overview of deposition processes use in the fabrication of microsystems. Deposition is the fabrication...
The Southwest Center for Microsystems Education is a Regional Advanced Technology Education Center funded in part by the National Science Foundation. The center provides information and training on the applications and...
This overview of nanotechnology is presented by the NaMCATE project. According to the introductory page, "in related silicon processes for fabrication of MEMS (microelectromechanical devices), deposition of so-called...

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