The Southwest Center for Microsystems Education presents this learning module on micromachining. The module provides an overview of three widely used micromachining processes for fabricating microsystems or MEMS: bulk,...
This page from the Southwest Center for Microsystems Education covers an overview of actuators. The documents in this learning module are designed to introduce students to actuators in the micro and macro scales....
This page from the Southwest Center for Microsystems Education covers an overview of Micropumps. Viewers will find both an Instructor and a Student Guide which contain information on micropumps, macropumps, the ...
This animation, created by Southwest Center for Microsystems Education (SCME), " illustrates the anisotropic etch on the backside of a silicon wafer. The chamber formed as a result of this etch is used as the r...
This animation, created by Southwest Center for Microsystems Education (SCME), "illustrates the removal or etch of the sacrificial layer of silicon dioxide. Removing this layer allows the micro-cantilevers to move. ...
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