This animation, created by Southwest Center for Microsystems Education (SCME), allows viewers to observe the operation of a micropressure sensor and the packaging of a micropressure sensor array. The animation ...
This page from the Southwest Center for Microsystems Education features a learning module which describes a general overview of the photolithography process use in the fabrication of microsystems as well as integrated...
This website includes the abstract of the article. Users may request the full article via the internet, which will be emailed to them. The merits of complementary double dipole illumination using 193 nm exposure...
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