ESC 211: Materials, Safety, and Equipment Overview for Nanotechnology
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1. Safety and Environmental Concerns
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2. Vacuum Function, Operation and Systems
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3. Materials Overview
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4. General Processing Concerns, Contamination, and Damage
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5. Basic Characterization Tools
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ESC 212: Basic Nanotechnology Processes
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1. An Introduction to Processing
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2. An Introduction to Uses of Plasmas in Processing |
Updating - coming soon! |
Updating - coming soon! |
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3. An Introduction to Wet Etching
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4. An Introduction to Basic Pattern Transfer |
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5. Chemical Vapor Deposition
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6. Physical Deposition
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ESC 213: Materials in Nanotechnology
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1. An Introduction to Colloidal and Self-Assembled Materials
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2. An Introduction to Nanoparticles and Nano Structures
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3. An Introduction to Nanoparticle Synthesis and Applications |
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4. Quantum Dots
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5. Micro- and Nano-materials in Bio-applications
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6. PDMS: An Example of a Versatile Material for Micro- and Nanotechnology
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ESC 214: Patterning for Nanotechnology
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1. Advanced Lithography General Information
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2. Advanced Lithography Tool Technologies
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3. Advanced Lithography and Resists
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4. Novel Lithography Techniques
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5. Novel Lithography Techniques: Block Copolymer Patterning
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ESC 215: Materials Modification for Nanotechnology Applications
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1. Material Fabrication Utilizing Plasma Enhanced Chemical Vapor Deposition (PECVD)
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2. Material Fabrication Utilizing Dry Etch Chemistry
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3. Advanced Etch Systems
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4. Oxidation and Dielectric Materials
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5. Organic Solar Cells
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ESC 216: Characterization, Testing of Nanotechnology Structures and Materials
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1. Basic Techniques
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2. Common Spectroscopic Measurements
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3. Electron Microscopy
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4. Advanced Scanning Probe Microscopy
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5. Surface Analysis
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Coming soon |
Coming soon |