ESC 212
Basic Nanotechnology Processes
This course is the hands-on introduction to the processing involved in "top down", "bottom up", and hybrid nanofabrication. The majority of the course details a step-by-step description of the equipment, facilities processes and process flow needed to fabricate devices and structures. This hands-on exposure covers basic nanofabrication processes including colloidal chemistry, self-assembly, catalyzed nanoparticle growth, lithography, wet and dry etching, physical vapor deposition, and chemical vapor deposition. An Introduction to Basic Pattern Transfer An Introduction to Wet Etching |