This course provides an overview of the materials, safety and equipment issues encountered in the practice of "top down" and "bottom up" nanofabrication. It focuses on safety, environmental and health issues in equipment operation and materials handling as well as on cleanroom protocol. Topics to be covered include: cleanroom operation, OSHA lab standard safety training, health issues, Biosafety Levels (BSL) guidelines, and environmental concerns.

ESC 211 Topics and Outline

Introduction

Safety and Environmental Concerns

Vacuum Function, Operation and Systems

Materials Overview

General Processing Concerns, Contamination and Damage

Basic Characterization Tools