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Title: Introduction to Low Pressure Chemical Vapor Deposition
Alternate Title: Introduction to LPCVD
Url: http://nano4me.live.subhub.com/downloads/20130404_5
Publisher: National Center for Nanotechnology Applications and Career Knowledge
Description:

This document, created by Pennsylvania State University and hosted by the Nanotechnology Applications and Career Knowledge Network, serves as a guide for an activity where students "review the fundamental principles and the operation of a low pressure chemical vapor deposition (LPCVD) system." The activity guide includes objectives, an introduction to chemical vapor deposition (CVD) and overviews of LPCVD components, a video demonstrating LPCVD operation, and questions to test student comprehension. In order to access and download this material, users must complete a free registration.

LC Classification: Technology -- Manufactures -- Metal manufactures. Metalworking -- Metal finishing and surface treatment (General) -- Vapor-plating. Chemical vapor deposition
Technology -- Technology (General) -- Nanotechnology
GEM Subject: Science -- Technology
Key Concept: Manufacturing -- Deposition
Date Issued: 2009
Resource Type: Instructional Material
Instructional Material -- Problem Set
Instructional Material -- Experiment/Lab Activity
Format: Document -- PDF
Document -- HTML
Audience: Educator
Education Level: Higher Education -- Undergraduate (Lower Division)
Language: English
Rights: The Pennsylvania State University
Access Rights: Free access with registration
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