The Road to Extreme-Ultraviolet Lithography

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Title:

The Road to Extreme-Ultraviolet Lithography

Url:

https://spie.org/news/0431-the-road-to-extreme-ultraviolet-lithography...

Creator:

La Fontaine, Bruno

Publisher:

Society of Photo-optical Instrumentation Engineers

Description: Extreme ultraviolet lithography promises to be the key enabler for patterning semiconductor devices of the future, but a number of challenges remain.

LC Classification:

Fine arts -- Print media -- Lithography -- Addresses, essays, lectures
Science -- Physics -- Optics. Light -- Spectroscopy -- Ultraviolet spectrum
Technology -- Mechanical engineering and machinery -- Control engineering systems. Automatic machinery -- Control systems -- Special, A-Z -- Semiconductors

GEM Subject:

Science -- Engineering
Science -- Technology

Key Concept:

Physics -- Lasers
Physics -- Semiconductors

Resource Type:

Reference Material
Instructional Material

Format:

Document -- HTML

Audience:

Educator
Learner
Professional/Practitioner

Education Level:

High School
Higher Education
Higher Education -- Undergraduate (Lower Division)
Higher Education -- Undergraduate (Upper Division)
Higher Education -- Technical Education (Upper Division)
Higher Education -- Technical Education (Lower Division)
Vocational/Professional Development Education

Language:

English

Rights:

SPIE

Access Rights:

Free access

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Source Type:

ATE Center

Source:

NetWorks

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