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Title: Fundamentals of Chemical Vapor Deposition
Url: http://www.enigmatic-consulting.com/semiconductor_processing/CVD_Fund...
Creator: Dobkin, Daniel Mark
Publisher: Enigmatic Consulting
Description: This web page offers a tutorial by Daniel M. Dobkin, Ph.D, proprietor of Enigmatics Consulting of Sunnyvale, California that introduces fundamental principles of chemical vapor deposition of films. Topics covered include CVD Basics, Review of Ideal Gases, Review of Kinetic Theory, Zero-Dimensional Transport: Stirred Reactor, Transport in Gaseous Media, Chemistry for CVD, Plasmas for CVD, CVD Films, and CVD Reactor Designs. According to the author, "The tutorial assumes a general background roughly equivalent to a BS degree in the physical sciences. The aspects of thermodynamics, statistical mechanics, chemistry, and electromagnetism needed for understanding CVD processes are reviewed here, but only in sufficient depth to remind the reader of a past acquaintance with the topicsÂ…. Some knowledge of the basics of semiconductor manufacturing is also helpful in following the discussion of films and applications." Visitors are free to copy and use any materials in the site, so long as licensing conditions stipulated by Creative Commons are met. (Details of the license can be found by clicking on a hyperlink to Creative Commons.)
LC Classification: Technology -- Chemical technology -- Biotechnology -- Processes, operations, and techniques
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Apparatus and materials -- Semiconductors
Technology -- Manufactures -- Metal manufactures. Metalworking -- Metal finishing and surface treatment (General) -- Vapor-plating -- Plasma-enhanced chemical vapor deposition
Technology -- Manufactures -- Metal manufactures. Metalworking -- Metal finishing and surface treatment (General) -- Vapor-plating. Chemical vapor deposition
Technology -- Technology (General) -- Technical education. Technical schools
GEM Subject: Science -- Engineering
Science -- Technology
Science -- Instructional issues
Vocational Education -- Technology
Vocational Education -- Instructional issues
Key Concept: Physics -- Semiconductors
Manufacturing -- Microfabrication
Key Concepts Complete: Yes
Resource Type: Demonstrations
Instructional Materials
Reading Materials
Science Materials
Format: html
Audience: College/University Instructors
Higher Education
Professional Formation
Teaching Professionals
University Postgrad
Language: English
Access Rights: Free access
Date Of Record Release: 2012-12-11 09:37:53 (W3C-DTF)
Date Last Modified: 2011-08-30 10:24:42 (W3C-DTF)
Source Type: ATE Center
Source: NetWorks
Full Record Views: 111
Resource URL Clicks: 23
Cumulative Rating: NOT YET RATED
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