Applied Math and Science Education Repository

(2 resources)

Bibliography. Library science. Information resources (General) -- Book industries and trade -- Printing -- Practical printing -- Other processes, A-Z -- Lithography

Resources

193nm Immersion Lithography: Status and Challenges

This article is a comprehensive review of 193nm immersion lithography. It focuses on the materials and processes rather than the optical system of the tool. The article covers the history and current status of the...

https://spie.org/news/immersionlitho-intro?SSO=1

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Double Exposure Makes Dense High-Resolution Diffractive Optics

This article from SPIE discusses an electron-beam-lithography technique which fabricates diffractive optical structures such as classic Fresnel-zone-plate lenses with fine features. Diffractive optical elements are...

https://spie.org/news/0599-double-exposure-makes-dense-high-...

more info

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