login
You are not logged in.
search:
AMSER logo



Title: Chemical Mechanical Planarization- Chemical
Url: http://matec.org/animations/#M068FL01
Publisher: Maricopa Advanced Technology Education Center (MATEC)
Description: This website includes an animation which illustrates the chemical action of slurry in the chemical-mechanical planarization process. Objective: Explain the mechanical and chemical steps in the CMP process. This simulation is from Module 068 of the Process & Equipment III Cluster of the MATEC Module Library (MML). Find this animation under the section "Process & Equipment III." To view other clusters or for more information about the MML visit http://matec.org/ps/library3/process_I.shtmlKey Phrase: MATEC Animation
LC Classification: Education -- Special aspects of education -- Types of education -- Vocational education (General)
Technology -- Chemical technology -- Chemical engineering
Technology -- Chemical technology -- Chemical engineering -- Chemical processes
Technology -- Chemical technology -- Chemicals
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Apparatus and materials -- Semiconductors
GEM Subject: Science -- Engineering
Science -- Technology
Science -- Physics
Science -- Instructional issues
Vocational Education -- Instructional issues
Key Concept: Physics -- Semiconductors
Mechanical engineering
Key Concepts Complete: Yes
Resource Type: Instructional Materials
InteractiveResource (DCMI Type Vocabulary)
Laboratory Modules
Science Materials
Format: flash
html
Audience: College/University Instructors
Higher Education
Professional Formation
Teaching Professionals
Technical School First Cycle
Technical School Second Cycle
University First Cycle
University Postgrad
University Second Cycle
Vocational Training
Language: English
Rights: Maricopa Advanced Technology Education Center
Access Rights: Free access
Date Of Record Release: 2012-12-07 09:35:51 (W3C-DTF)
Date Last Modified: 2011-08-25 15:29:50 (W3C-DTF)
Source Type: ATE Center
Source: NetWorks
Full Record Views: 137
Resource URL Clicks: 42
Cumulative Rating: NOT YET RATED
Report a Problem with this Resource Record

Resource Comments

(no comments available yet for this resource)

user login
Username:
Password:
why log in?
Manage your resources
Save, organize, and share resources that you find.

Subscribe to bulletins
Automatically be notified about new resources that match your interests.

It's easy, fast, and FREE!
AMSER =
FREE ONLINE
RESOURCES
for the
CLASSROOM

Copyright 2014 Internet Scout Resource Metadata
Copyright 2014 Internet Scout
NSF NSDL University of Wisconsin Internet Scout
Leave Feedback
http://amser.org/