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Title: Workflow in the Planarization Tool SWF
Url: http://matec.org/animations/matec/M069FL01.swf
Publisher: Maricopa Advanced Technology Education Center (MATEC)
Description: Animation of the workflow in the planarization tool. The objective is to describe the workflow of a planarization workstation.This simulation is from Module 069 of the Process & Equipment III Cluster of the MATEC Module Library (MML).
LC Classification: Science -- Physics -- Study and teaching. Research
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Apparatus and materials -- Semiconductors
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Microelectronics. Integrated circuits
GEM Subject: Science -- Engineering
Science -- Technology
Science -- Physics
Key Concept: Physics -- Circuits
Physics -- Semiconductors
Key Concepts Complete: Yes
Resource Type: Instructional Materials
InteractiveResource (DCMI Type Vocabulary)
MovingImage (DCMI Type Vocabulary)
Reading Materials
Science Materials
Format: html
shockwave
Audience: College/University Instructors
Higher Education
Professional Formation
Secondary Education
Students
Teachers
Technical School First Cycle
University First Cycle
University Postgrad
University Second Cycle
Vocational Training
Language: English
Access Rights: Free access
Date Of Record Release: 2011-07-29 03:00:05 (W3C-DTF)
Date Last Modified: 2011-08-25 15:36:59 (W3C-DTF)
Source Type: ATE Center
Source: NetWorks
Full Record Views: 149
Resource URL Clicks: 18
Cumulative Rating: NOT YET RATED
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