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Title: Anisotropic Etching, Silicon Crystal Orientation, and MEMS SWF
Url: http://www.matec.org/forums/_attachments/lil_one/atvi.swf
Creator: Lopez, Fabian
Publisher: Maricopa Advanced Technology Education Center (MATEC)
Description: The goal of this interactive Learning Invention Lab from MATEC is to help students understand how crystal orientation affects etch profiles in silicon. There are several diagrams and hands-on activities for students to do. Visit MATEC.org homepage for more information.
LC Classification: Science -- Physics -- Electricity and magnetism -- Electricity -- Electric current (General) -- Electric conductivity -- Semiconductor physics -- Specific semiconducting substances and types, A-Z -- Silicon
Technology -- Chemical technology -- Chemical engineering -- Special processes and operations, A-Z -- Etching
Technology -- Electrical engineering. Electronics. Nuclear engineering -- Electrical engineering. Electronics. Nuclear engineering -- Electronics -- Microelectronics. Integrated circuits
Technology -- Engineering (General). Civil engineering -- Engineering (General). Civil engineering (General) -- Materials of engineering and construction -- Materials of special composition or structure, A-Z -- Nanostructured materials
Technology -- Technology (General) -- Nanotechnology
GEM Subject: Science -- Engineering
Science -- Technology
Science -- Instructional issues
Vocational Education -- Technology
Vocational Education -- Instructional issues
Key Concept: Electrical engineering
Manufacturing -- Nanofabrication
Resource Type: Demonstrations
Instructional Materials
Lesson Plans
Science Materials
Format: flash
shockwave
Audience: College/University Instructors
Higher Education
Technical School First Cycle
Technical School Second Cycle
University First Cycle
University Postgrad
University Second Cycle
Vocational Training
Language: English
Access Rights: Free access
Subject: Engineering Education
Date Of Record Release: 2012-12-31 09:54:32 (W3C-DTF)
Date Last Modified: 2011-08-19 13:11:14 (W3C-DTF)
Source Type: ATE Center
Source: NetWorks
Full Record Views: 69
Resource URL Clicks: 9
Cumulative Rating: NOT YET RATED
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